The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2024
Filed:
Aug. 31, 2021
Applicant:
Texas Instruments Incorporated, Dallas, TX (US);
Inventors:
Bichoy Bahr, Allen, TX (US);
Jeronimo Segovia Fernandez, San Jose, CA (US);
Hassan Omar Ali, Murphy, TX (US);
Assignee:
TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01J 1/46 (2006.01); G01J 1/04 (2006.01); G02B 5/20 (2006.01);
U.S. Cl.
CPC ...
G01J 1/46 (2013.01); G01J 1/0403 (2013.01); G01J 1/0488 (2013.01); G02B 5/208 (2013.01);
Abstract
An example apparatus includes: a semiconductor substrate; a mechanical resonator supported by the substrate, the mechanical resonator including an array of capacitors; and a plasmonic infrared (IR) absorber including an array of metal structures. The mechanical resonator is between the substrate and the IR absorber.