The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 19, 2024

Filed:

Dec. 17, 2021
Applicants:

Yokogawa Electric Corporation, Tokyo, JP;

Yokogawa Test & Measurement Corporation, Tokyo, JP;

Inventor:

Nobuhide Yamada, Hachioji, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02001 (2022.01); G01B 9/02 (2022.01); G01J 9/02 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02011 (2013.01); G01J 9/0246 (2013.01); G01B 9/02051 (2013.01); G01B 2290/20 (2013.01); G01B 2290/45 (2013.01); G01B 2290/70 (2013.01); G01J 2009/0265 (2013.01);
Abstract

The interferometeraccording to this disclosure includes: a first optical componentthat splits each of the P polarization component and the S polarization component of the light to be measured into the first optical path Rand the second optical path Rand combines the light to be measured; a second optical componentplaced in the first optical path; a third optical componentthat splits the light to be measured into the P polarization component and the S polarization component; and a P polarization detectorand an S polarization detectorthat respectively detect the P polarization component and the S polarization component split by the third optical component, wherein the second optical component has an optical surface that changes the propagation direction of the light to be measured and gives a phase difference between the P polarization component and the S polarization component.


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