The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 19, 2024

Filed:

Mar. 01, 2018
Applicant:

Schunk Kohlenstofftechnik Gmbh, Heuchelheim, DE;

Inventors:

Karl Brennfleck, Karlsruhe, DE;

Johannes Galle, Hundsangen, DE;

Dennis Muscutt, Lollar, DE;

Volker Rauhut, Buseck, DE;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/34 (2006.01); C23C 16/02 (2006.01); C23C 16/04 (2006.01); C23C 16/46 (2006.01);
U.S. Cl.
CPC ...
C23C 16/345 (2013.01); C23C 16/0272 (2013.01); C23C 16/045 (2013.01); C23C 16/46 (2013.01);
Abstract

The invention relates to a method for producing a product, to a crucible and to the use of a layer of crystalline silicon nitride, the product being formed from a material consisting mainly of carbon or of a ceramic material, the product being coated with surface layer by chemical vapor deposition (CVD), wherein the product is coated with a surface layer of at least semi-crystalline, preferably crystalline silicon nitride (SiN), the surface layer being formed on the product at a process temperature of more than 1100° C. to 1700° C.


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