logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11929266 B1

PDFFull Text
Date of Patent:
Mar. 12, 2024

Filed:

Feb. 25, 2022

Wafer supporting device

Applicant:

Nissin Ion Equipment Co., Ltd., Koka, JP;

Inventor:

Takashi Sakamoto, Shiga, JP;

Assignee:

NISSIN ION EQUIPMENT CO., LTD., Koka, JP;

Attorney:

Sughrue Mion, PLLC

Primary Examiner:

Michael Maskell

Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01J 37/05 (2006.01); H01J 37/20 (2006.01); H01J 37/317 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67103 (2013.01); H01J 37/05 (2013.01); H01J 37/20 (2013.01); H01J 37/3171 (2013.01); H01L 21/6833 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/20235 (2013.01);
Abstract

A wafer support device includes a support base having a wafer-facing surface, the support base comprising a heater, and an electrostatic chuck supported by the support base, the electrostatic chuck having an attraction surface configured to attract a wafer for wafer processing. During the wafer processing, the wafer-facing surface and the attraction surface are positioned at respective different positions in a direction perpendicular to the wafer-facing surface so that the attraction surface is separated from the wafer-facing surface by a distance.

Find Patent Forward Citations

Quick Actions:

Sakamoto, Takashi. (2024). Wafer supporting device (U.S. Patent No. 11929266). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11929266

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…