The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2024
Filed:
Dec. 17, 2021
Trumpf Huettinger Sp. Z O. O., Zielonka, PL;
Jakub Swiatnicki, Zdunska Wola, PL;
Krzysztof Ruda, Zielonka, PL;
Mateusz Wiosna, Gluchow, PL;
Grzegorz Toczylowski, Zabki, PL;
Jialei Chen, Shanghai, CN;
TRUMPF HUETTINGER SP. Z O. O., Zielonka, PL;
Abstract
A method adjusts an output power of a power supply supplying electrical power to a plasma in a plasma chamber. The method includes: connecting the power supply to at least one electrode in the plasma chamber; transporting one or more substrates relative to the electrode using a substrate carrier; maintaining the plasma by the electrical power; processing the one or more substrates with the plasma; and adjusting the output power based on a parameter related to a distance between a surface of the electrode facing a carrier-substrate-assembly and a surface of the substrate-carrier-assembly facing the electrode.