The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2024
Filed:
Jun. 09, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Nitin Deepak, Maharashtra, IN;
Tapash Chakraborty, Maharashtra, IN;
Prerna Sonthalia Goradia, Mumbai, IN;
Visweswaren Sivaramakrishnan, Cupertino, CA (US);
Nilesh Chimanrao Bagul, Bangalore, IN;
Bahubali S. Upadhye, Bangalore, IN;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Methods for etching alkali metal compounds are disclosed. Some embodiments of the disclosure expose an alkali metal compound to an alcohol to form a volatile metal alkoxide. Some embodiments of the disclosure expose an alkali metal compound to a β-diketone to form a volatile alkali metal β-diketonate compound. Some embodiments of the disclosure are performed in-situ after a deposition process. Some embodiments of the disclosure provide methods which selectively etch alkali metal compounds.