The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2024
Filed:
Jun. 04, 2020
Applicant:
Usound Gmbh, Graz, AT;
Inventors:
Andrea Rusconi Clerici Beltrami, Vienna, AT;
Ferruccio Bottoni, Graz, AT;
Nick Renaud-Bezot, Vienna, AT;
Assignee:
USound GmbH, Graz, AT;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 17/00 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); H04R 7/04 (2006.01); H04R 17/02 (2006.01); H04R 31/00 (2006.01);
U.S. Cl.
CPC ...
H04R 17/005 (2013.01); B81B 3/007 (2013.01); B81C 1/00658 (2013.01); H04R 7/04 (2013.01); H04R 17/02 (2013.01); H04R 31/003 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/0127 (2013.01); H04R 2201/003 (2013.01); H04R 2307/025 (2013.01); H04R 2400/01 (2013.01);
Abstract
A method for manufacturing a MEMS sound transducer for generating and/or detecting sound waves in the audible wavelength range and/or in the ultrasonic range, includes arranging at least one piezoelectric element on a support substrate. A diaphragm is formed on the at least one piezoelectric element. In forming the diaphragm, a flowable and curable polymer, which forms the diaphragm after curing, is at least partially cast around the at least one piezoelectric element. The invention further relates to the MEMS sound transducer formed by the method.