The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2024
Filed:
Apr. 22, 2021
Applicant:
X-fab Dresden Gmbh & Co. KG, Dresden, DE;
Inventor:
Victor Sizov, Dresden, DE;
Assignee:
X-FAB DRESDENT GMBH & CO. KG, Dresden, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/778 (2006.01); H01L 29/20 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/778 (2013.01); H01L 29/2003 (2013.01); H01L 29/66462 (2013.01);
Abstract
A semiconductor contact structure including a two-dimensional electron gas (2DEG) between a first and a second semiconductor layer and a silicon implant extending into at least a part of the first semiconductor layer and into at least a part of the second semiconductor layer and connected to the 2DEG along an interface between the 2DEG and the silicon implant, wherein the interface has a nonlinear shape. The structure further includes a contact connected to the 2DEG via the silicon implant.