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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11921059 B1

PDFFull Text
Date of Patent:
Mar. 05, 2024

Filed:

Jul. 11, 2023

Inspection apparatus and inspection method

Applicant:

Canon Anelva Corporation, Kawasaki, JP;

Inventor:

Takeo Tsukamoto, Niigata, JP;

Assignee:

CANON ANELVA CORPORATION, Kawasaki, JP;

Attorney:

BUCHANAN INGERSOLL & ROONEY PC

Primary Examiner:

Thomas R Artman

Int. Cl.
CPC ...
G01N 23/04 (2018.01); G01N 23/083 (2018.01); G01N 23/18 (2018.01); G01N 23/20008 (2018.01); G01N 23/2206 (2018.01); G01N 23/223 (2006.01); G21K 7/00 (2006.01); H01J 35/18 (2006.01);
U.S. Cl.
CPC ...
G01N 23/18 (2013.01); G01N 23/04 (2013.01); G01N 23/083 (2013.01); G01N 23/20008 (2013.01); G01N 23/2206 (2013.01); G01N 23/223 (2013.01); G21K 7/00 (2013.01); H01J 35/186 (2019.05); G01N 2223/04 (2013.01); G01N 2223/052 (2013.01); G01N 2223/071 (2013.01); G01N 2223/076 (2013.01); G01N 2223/1016 (2013.01); G01N 2223/20 (2013.01); G01N 2223/204 (2013.01); G01N 2223/32 (2013.01); G01N 2223/643 (2013.01); G01N 2223/652 (2013.01);
Abstract

An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector has an energy resolution not less than 1 keV or the X-ray detector has no energy analysis function.

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