The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2024
Filed:
Nov. 23, 2022
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventor:
Horst Theuss, Wenzenbach, DE;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/17 (2006.01); B81C 1/00 (2006.01); G01N 29/24 (2006.01); G01R 33/028 (2006.01);
U.S. Cl.
CPC ...
G01N 21/1702 (2013.01); B81C 1/00119 (2013.01); G01N 29/2418 (2013.01); G01R 33/0286 (2013.01); B81C 2203/0118 (2013.01); B81C 2203/035 (2013.01); G01N 2021/1704 (2013.01); G01N 2291/021 (2013.01);
Abstract
A method is disclosed. In one example, the method includes bonding a first panel of a first material to a base panel in a first gas atmosphere, wherein multiple hermetically sealed first cavities encapsulating gas of the first gas atmosphere are formed between the first panel and the base panel. The method further includes bonding a second panel of a second material to at least one of the base panel and the first panel, wherein multiple second cavities are formed between the second panel and the at least one of the base panel and the first panel.