The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2024
Filed:
Mar. 01, 2021
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Takahiro Yatsu, Tokyo, JP;
SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo, JP;
Abstract
A cryopump includes an accommodation space for a condensed layer of gas, a first-stage cryopanel having an inner surface of the first-stage cryopanel disposed so as to surround the accommodation space, and a second-stage cryopanel disposed so as to be surrounded by the inner surface of the first-stage cryopanel together with the accommodation space. A first-stage heat load is incident on the inner surface of the first-stage cryopanel from outside the cryopump through an intake port, and the gas enters the accommodation space from outside the cryopump. The first-stage cryopanel is cooled to a temperature higher than a condensation temperature of the gas, the second-stage cryopanel is cooled to a temperature of the condensation temperature or less, and the condensed layer is deposited. The cryopump monitors the amount of condensed gas in the accommodation space based on a change in the first-stage heat load.