The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2024
Filed:
Apr. 17, 2020
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Ole Luckner, Dresden, DE;
Wolfgang R. Aderhold, Cupertino, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/687 (2006.01); G01J 5/02 (2022.01); H05B 3/00 (2006.01); G01B 11/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67259 (2013.01); G01B 11/026 (2013.01); G01J 5/02 (2013.01); H01L 21/67115 (2013.01); H01L 21/67248 (2013.01); H01L 21/68721 (2013.01); H05B 3/0047 (2013.01);
Abstract
Aspects of the present disclosure relate to apparatus, systems, and methods of measuring edge ring distance for thermal processing chambers. In one example, the distance measured is used to determine a center position shift of the edge ring.