The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2024
Filed:
Aug. 27, 2021
Applicant:
Ulvac-phi, Incorporated, Kanagawa, JP;
Inventors:
Scott R. Bryan, Chanhassen, MN (US);
Gregory L. Fisher, Chaska, MN (US);
David H. Narum, Orono, MN (US);
Ronald E. Negri, Minnetonka, MN (US);
Assignee:
ULVAC-PHI, INCORPORATED, Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/02 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/026 (2013.01); H01J 37/28 (2013.01); H01J 2237/0045 (2013.01); H01J 2237/2527 (2013.01);
Abstract
Surface imaging apparatuses, surface analysis apparatuses, methods based on detection of secondary electrons or secondary ions that include a spatially scanned and DC or pulsed primary excitation source resulting in secondary electrons or secondary ions which are detected and provide the modulated signal for imaging of the sample; and dual polarity flood beams to effect neutralization of surface charge and surface potential variation.