The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 27, 2024

Filed:

Jun. 17, 2019
Applicant:

Tamapoly Co., Ltd., Tokyo, JP;

Inventors:

Shinichi Oya, Tokyo, JP;

Toshiaki Hagiwara, Tokyo, JP;

Hitoshi Nakamura, Tokyo, JP;

Assignee:

TAMAPOLY CO., LTD., Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/11 (2006.01); B32B 27/08 (2006.01); B32B 27/32 (2006.01); C08J 5/18 (2006.01); C08L 23/06 (2006.01); G03F 7/09 (2006.01);
U.S. Cl.
CPC ...
G03F 7/11 (2013.01); B32B 27/08 (2013.01); B32B 27/32 (2013.01); C08J 5/18 (2013.01); C08L 23/06 (2013.01); G03F 7/094 (2013.01); B32B 2255/10 (2013.01); B32B 2307/20 (2013.01); C08J 2423/06 (2013.01); C08L 2203/16 (2013.01); C08L 2207/066 (2013.01);
Abstract

A cover film for dry film resist, includes a polyethylene film including a first mixture of high pressure low density polyethylene (LDPE) and linear low density polyethylene (LLDPE). The first mixture has an LDPE to LLDPE ratio by mass of from 90:10 to 60:40. The polyethylene film is free of a plasticizer, anti-blocking agent, slipping agent, and anti-static agent. The number of fish eyes having a minimum diameter of 0.2 mm or greater present in 100 mof the 19 μm thick cover film in plan view is at most two. The polyethylene film has a thickness of from 10 to 20 μm and a haze value of from 12 to 25%.


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