The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2024
Filed:
Apr. 29, 2022
Applicant:
Pukyong National University Industry-university Cooperation Foundation, Busan, KR;
Inventor:
Hansang Kwon, Busan, KR;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); B22F 3/105 (2006.01); B22F 3/24 (2006.01); B22F 9/04 (2006.01); C23C 4/11 (2016.01); C22C 38/10 (2006.01); C23C 4/134 (2016.01); C01F 7/021 (2022.01); B23Q 3/15 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); B22F 3/105 (2013.01); B22F 3/24 (2013.01); B22F 9/04 (2013.01); B23Q 3/15 (2013.01); C01F 7/021 (2013.01); C22C 38/105 (2013.01); C23C 4/11 (2016.01); C23C 4/134 (2016.01); B22F 2003/1051 (2013.01); B22F 2003/242 (2013.01); B22F 2009/043 (2013.01); B22F 2301/052 (2013.01); B22F 2302/40 (2013.01);
Abstract
This application relates to a method of manufacturing an electrostatic chuck having good characteristics in heat dissipation, thermal shock resistance, and lightness. In one aspect, the method includes preparing a composite powder by ball-milling (i) aluminum or aluminum alloy powder and (ii) carbon-based nanomaterial powder. The method may also include preparing an electrode layer by sintering the composite powder through spark plasma sintering (SPS), and forming a dielectric layer on the electrode layer.