The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2024
Filed:
Feb. 25, 2021
Applicant:
Kokusai Electric Corporation, Tokyo, JP;
Inventors:
Tokunobu Akao, Toyama, JP;
Hitoshi Murata, Toyama, JP;
Akinori Tanaka, Toyama, JP;
Masaaki Ueno, Toyama, JP;
Assignee:
Kokusai Electric Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01K 1/14 (2021.01); H01L 21/67 (2006.01); H01L 21/66 (2006.01); G01K 1/143 (2021.01);
U.S. Cl.
CPC ...
G01K 1/146 (2013.01); G01K 1/143 (2013.01); H01L 21/67248 (2013.01); H01L 22/12 (2013.01);
Abstract
According to one aspect of the technique, there is provided a substrate temperature sensor configured to measure a temperature of a substrate, wherein the substrate temperature sensor is provided in a protective pipe passing through a notch provided at least in a bottom plate of a substrate retainer inserted into a process chamber in a state where the substrate is mounted on the substrate retainer.