The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2024
Filed:
Nov. 29, 2019
Applicant:
Hitachi, Ltd., Tokyo, JP;
Inventors:
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B06B 1/02 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); A61B 8/12 (2006.01); A61B 8/00 (2006.01); A61B 5/00 (2006.01); G01N 29/24 (2006.01);
U.S. Cl.
CPC ...
B06B 1/0292 (2013.01); A61B 5/0095 (2013.01); A61B 8/12 (2013.01); A61B 8/4494 (2013.01); B81B 3/0021 (2013.01); B81C 1/00158 (2013.01); G01N 29/2406 (2013.01); B81B 2201/0271 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0315 (2013.01); B81B 2203/04 (2013.01); B81C 2201/0105 (2013.01); G01N 2291/101 (2013.01);
Abstract
A highly-sensitive ultrasonic transducer with good yield is provided. The ultrasonic transducer includes a cavity layer, a pair of electrodes positioned above and below the cavity layer, insulating layers disposed above and below each of the pair of electrodes, and a filled hole that penetrates, in a vertical direction, at least a portion of the insulating layers positioned above the cavity layer. When the ultrasonic transducer is viewed from above, each electrode of the pair of electrodes includes, at a position that overlaps the embedded hole, a non-electrode region where the electrodes are not formed.