The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2024
Filed:
Sep. 02, 2021
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Yann Mignot, Slingerlands, NY (US);
Christopher J. Waskiewicz, Rexford, NY (US);
Su Chen Fan, Cohoes, NY (US);
Brent Anderson, Jericho, VT (US);
Junli Wang, Slingerlands, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 23/48 (2006.01); H01L 21/8234 (2006.01); H01L 29/78 (2006.01); H01L 29/08 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66795 (2013.01); H01L 21/823418 (2013.01); H01L 21/823431 (2013.01); H01L 23/481 (2013.01); H01L 29/0847 (2013.01); H01L 29/7851 (2013.01);
Abstract
A semiconductor device containing a self-aligned contact rail is provided. The self-aligned contact rail can have a reduced critical dimension, CD. The self-aligned contact rail can be obtained utilizing a sacrificial semiconductor fin as a placeholder structure for the contact rail. The used of the sacrificial semiconductor fin enables reduced, and more controllable, CDs.