The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2024
Filed:
Oct. 08, 2021
Samsung Electronics Co., Ltd., Suwon-si, KR;
Myungsoo Seo, Suwon-si, KR;
Sangjung Kang, Suwon-si, KR;
Juyoun Kim, Suwon-si, KR;
Seulgi Yun, Hwaseong-si, KR;
Seki Hong, Hwaseong-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
A method of manufacturing a semiconductor device includes forming a dummy gate structure on a substrate, partially removing the dummy gate structure to form a first opening that divides the dummy gate structure, forming a first division pattern structure in the first opening, replacing the dummy gate structure with a gate structure, removing the first division pattern structure to form a second opening, removing a portion of the gate structure from a sidewall of the second opening to enlarge the second opening, and forming a second division pattern in the enlarged second opening.