The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2024
Filed:
Apr. 24, 2020
Applicant:
Lg Electronics Inc., Seoul, KR;
Inventors:
Assignee:
LG ELECTRONICS INC., Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2006.01); H01L 21/50 (2006.01); H01L 21/67 (2006.01); H01L 25/075 (2006.01); H01L 33/00 (2010.01); H05K 13/04 (2006.01); H05K 13/02 (2006.01); H01L 21/60 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68 (2013.01); H01L 21/50 (2013.01); H01L 21/67126 (2013.01); H01L 21/67144 (2013.01); H01L 25/0753 (2013.01); H01L 33/0095 (2013.01); H05K 13/027 (2013.01); H05K 13/046 (2013.01); H05K 13/0478 (2013.01); H01L 2021/6009 (2013.01); H01L 2933/005 (2013.01); H01L 2933/0066 (2013.01);
Abstract
Discussed is a substrate chuck for allowing one surface of a substrate to be in contact with a fluid, the substrate chuck including a first frame having a hole at a central portion thereof; a second frame having a hole at a central portion thereof and disposed to overlap the first frame; and a frame transfer part configured to vertically move the second frame with respect to the first frame, wherein the first frame includes: a bottom portion at which the hole is formed; and a sidewall portion formed on a peripheral edge of the bottom portion, and wherein a height of the sidewall portion is greater than a depth at which the substrate is placed into the fluid.