The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2024
Filed:
Feb. 14, 2022
Applicants:
Uchicago Argonne, Llc, Chicago, IL (US);
Incom, Inc., Charlton, MA (US);
Inventors:
Jeffrey W. Elam, Elmhurst, IL (US);
Anil U. Mane, Naperville, IL (US);
Mark Popecki, Durham, NH (US);
Michael Minot, Andover, MA (US);
Assignees:
UCHICAGO ARGONNE, LLC, Chicago, IL (US);
INCOM, INC., Charlton, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 9/12 (2006.01); H01J 43/24 (2006.01); C23C 16/455 (2006.01); C23C 16/40 (2006.01); H01J 9/42 (2006.01); H01J 40/04 (2006.01); H01J 40/16 (2006.01);
U.S. Cl.
CPC ...
H01J 9/125 (2013.01); C23C 16/403 (2013.01); C23C 16/45527 (2013.01); C23C 16/45553 (2013.01); H01J 9/42 (2013.01); H01J 40/04 (2013.01); H01J 40/16 (2013.01); H01J 43/246 (2013.01);
Abstract
A secondary electron emissive layer resistant to infiltration and fouling. A barrier layer is formed by atomic layer deposition. The barrier layer may be an emissive layer and/or an interlayer. The barrier layer may form an interlayer that is a part of an electron amplifier positioned between an emissive layer and a resistive layer. The barrier layer is resistive to fluorine migration from either the emissive layer or the resistive layer.