The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 13, 2024

Filed:

Mar. 30, 2020
Applicant:

Hitachi High-tech Corporation, Tokyo, JP;

Inventors:

Fumihiro Sasajima, Tokyo, JP;

Masami Takano, Tokyo, JP;

Kazuhiro Ueda, Tokyo, JP;

Masayoshi Ishikawa, Tokyo, JP;

Yasuhiro Yoshida, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 23/02 (2006.01);
U.S. Cl.
CPC ...
G05B 23/024 (2013.01); G05B 23/0264 (2013.01);
Abstract

The present disclosure proposes a diagnostic system capable of properly identifying the cause of even an error for which multiple factors or multiple compound factors may be accountable. The diagnostic system according to the present disclosure is provided with a learning device for learning at least one of a recipe defining operations of an inspection device, log data describing states of the device, or specimen data describing characteristics of a specimen in association with error types of the device, and estimates the cause of the error by using the learning device (refer to FIG.).


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