The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2024
Filed:
Apr. 10, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Bernard Frey, Livermore, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Methods and apparatus for transporting a flexible substrate are provided. In one embodiment, an air turn is disclosed that includes a body, a porous cover disposed about a circumference of the body, and two seals. Each of the two seals are positioned about the circumference of the body and spaced apart from each other in a longitudinal direction of the body to define a central zone bounded by a second zone and by a third zone. The second zone and third zone are each positioned outside of a respective seal. The body includes a first opening formed along a longitudinal axis of the body, and a plurality of second openings formed in the body at a position other than along the longitudinal axis.