The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2024
Filed:
Oct. 14, 2022
Applicant:
Wonik Qnc Corporation, Gumi-si, KR;
Inventors:
Yoonjae Yu, Yongin-si, KR;
Seungyoung Oh, Hwaseong-si, KR;
Eunyoung Choi, Hwaseong-si, KR;
Joohee Jang, Hwaseong-si, KR;
Soyoung Choi, Anseong-si, KR;
Sanghyun Cho, Suwon-si, KR;
Assignee:
WONIK QNC Corporation, Gumi-si, KR;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 8/36 (2006.01); C23C 8/06 (2006.01);
U.S. Cl.
CPC ...
C23C 8/36 (2013.01); C23C 8/06 (2013.01);
Abstract
Disclosed are a processing method for fluorination of a fluorination-target component for semiconductor fabrication equipment, which may realize high density and high strength by fluorinating the fluorination-target component using a fluorinating gas excited into plasma, and at the same time, may significantly reduce plasma contaminant particles which are generated during formation of a fluoride coating, and a fluorinated component obtained by the method.