The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 06, 2024

Filed:

Mar. 02, 2021
Applicants:

Wisconsin Alumni Research Foundation, Madison, WI (US);

The Research Foundation for the State University of New York, Amherst, NY (US);

Inventors:

Zhenqiang Ma, Middleton, WI (US);

Zhenyang Xia, Madison, WI (US);

Ming Zhou, Middleton, WI (US);

Qiaoqiang Gan, Buffalo, NY (US);

Zongfu Yu, Madison, WI (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/146 (2006.01); G01J 3/02 (2006.01); G01J 3/28 (2006.01); H04N 23/11 (2023.01);
U.S. Cl.
CPC ...
H01L 27/14605 (2013.01); G01J 3/021 (2013.01); G01J 3/2803 (2013.01); G01J 3/2823 (2013.01); H01L 27/14629 (2013.01); H04N 23/11 (2023.01); G01J 2003/2813 (2013.01); G01J 2003/2826 (2013.01);
Abstract

Hyperspectral resonant cavity imaging spectrometers and imaging systems incorporating the resonant cavity spectrometers are provided. The spectrometers include an array of photodetectors based on photosensitive semiconductor nanomembranes disposed between two dielectric spacers, each of the dielectric spacers having a thickness gradient along a lateral direction, such that the resonant cavity height differs for different photodetectors in the array.


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