The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2024
Filed:
Jan. 05, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Jacob Newman, Palo Alto, CA (US);
Ulrich Oldendorf, Ober-Ramstadt, DE;
Martin Aenis, Darmstadt, DE;
Andrew J. Constant, Cupertino, CA (US);
Shay Assaf, Gilroy, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Alexander Berger, Palo Alto, CA (US);
William Tyler Weaver, Austin, TX (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.