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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11890643 B1

PDFFull Text
Date of Patent:
Feb. 06, 2024

Filed:

Aug. 14, 2020

Piezoelectric micromachined ultrasonic transducer and method of fabricating the same

Applicant:

Vanguard International Semiconductor Corporation, Hsinchu, TW;

Inventors:

You Qian, Singapore, SG;

Joan Josep Giner de Haro, Singapore, SG;

Rakesh Kumar, Singapore, SG;

Jia Jie Xia, Singapore, SG;

Assignee:

Vanguard International Semiconductor Corporation, Hsinchu, TW;

Attorney:

Winston Hsu

Primary Examiner:

Derek J Rosenau

Int. Cl.
CPC ...
B06B 1/06 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
B06B 1/0666 (2013.01); B81B 3/0021 (2013.01); B81C 1/00158 (2013.01); B81B 2201/0271 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0315 (2013.01); B81C 2201/014 (2013.01); B81C 2201/0133 (2013.01);
Abstract

A PMUT includes a substrate, a stopper, and a multi-layered structure, where the substrate includes a corner, and a cavity is disposed in the substrate. The stopper is in contact with the corner of the substrate and the cavity. The multi-layered structure is disposed over the cavity and attached to the stopper and the multi-layered structure includes at least one through hole in contact with the cavity.

Find Patent Forward Citations

Qian, You. (2024). Piezoelectric micromachined ultrasonic transducer and method of fabricating the same (U.S. Patent No. 11890643). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11890643

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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