The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 30, 2024

Filed:

May. 23, 2018
Applicant:

Edwards Japan Limited, Yachiyo, JP;

Inventors:

Yoshinobu Ohtachi, Yachiyo, JP;

Yasushi Maejima, Yachiyo, JP;

Tsutomu Takaada, Yachiyo, JP;

Assignee:

Edwards Japan Limited, Yachiyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04D 29/58 (2006.01); H05B 1/02 (2006.01); F04D 19/04 (2006.01); F16K 49/00 (2006.01); F16L 53/37 (2018.01); F16L 53/38 (2018.01);
U.S. Cl.
CPC ...
H05B 1/0244 (2013.01); F04D 19/042 (2013.01); F04D 29/58 (2013.01); F04D 29/584 (2013.01); F04D 19/04 (2013.01); F16K 49/002 (2013.01); F16L 53/37 (2018.01); F16L 53/38 (2018.01);
Abstract

A vacuum pump suitable for prolonging the life of a heating means used as a measure to prevent product deposition in the vacuum pump, and a heating device for the vacuum pump. A vacuum pump that exhausts gas by rotation of a rotating body has an exhaust flow path for exhausting the gas, and a heating means for heating the exhaust flow path, wherein the heating means has a plurality of resistance heating elements connected in parallel to a pair of wiring lines. The heating means has a current measuring means for measuring a sum of values of currents flowing through the plurality of resistance heating elements, a determination means for determining failure conditions of the plurality of resistance heating elements on the basis of a measured value obtained by the current measuring means, and an output means for outputting the failure conditions determined by the determination means.


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