The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 30, 2024

Filed:

Oct. 16, 2019
Applicant:

Nippon Telegraph and Telephone Corporation, Tokyo, JP;

Inventors:

Takuya Tsutsumi, Tokyo, JP;

Hideaki Matsuzaki, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/778 (2006.01); H01L 21/285 (2006.01); H01L 29/205 (2006.01); H01L 29/423 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7786 (2013.01); H01L 21/28581 (2013.01); H01L 29/205 (2013.01); H01L 29/42316 (2013.01); H01L 29/66462 (2013.01);
Abstract

A gate opening portion, which is disposed within a recess formation region in a state where the distance from a drain electrode is greater than the distance from a source electrode, is formed in an insulating layer. The gate opening portion is a stripe-shaped opening that extends in a gate width direction. Also, a plurality of asymmetric recess-forming opening portions are formed, arranged in a row in the gate width direction between the gate opening portion and the drain electrode within the recess formation region in the insulating layer. In this step, asymmetric recess-forming opening portions are formed whose opening size in the gate length direction is greater than the opening size in the gate width direction.


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