The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2024
Filed:
Jan. 11, 2023
Asmpt Nexx, Inc., Billerica, MA (US);
Arthur Keigler, Billerica, MA (US);
David G. Guarnaccia, Billerica, MA (US);
Freeman Fisher, Billerica, MA (US);
Demetrius Papapanayiotou, Billerica, MA (US);
Jonathan Haynes, Billerica, MA (US);
Daniel L. Goodman, Billerica, MA (US);
ASMPT NEXX, INC., Billerica, MA (US);
Abstract
A system and method for plating a workpiece are described. In one aspect, an apparatus includes a deposition chamber, a workpiece holder adapted for insertion into and removal from the deposition chamber, a shield with patterns of apertures corresponding to features on the workpiece, a shield holder also adapted for insertion into and removal from the deposition chamber and a positioning mechanism to position the workpiece in the workpiece holder such that the pattern of apertures on the shield will align with the corresponding features on the workpiece when the workpiece holder and shield holder are inserted into the deposition chamber.