The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2024
Filed:
Apr. 07, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Graham Wright, Newburyport, MA (US);
Ryan C. Prager, Beverly, MA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/08 (2006.01); H01J 37/317 (2006.01); C23C 14/48 (2006.01); H01J 37/05 (2006.01);
U.S. Cl.
CPC ...
H01J 37/08 (2013.01); C23C 14/48 (2013.01); H01J 37/05 (2013.01); H01J 37/3171 (2013.01); H01J 2237/0815 (2013.01);
Abstract
An ion source is provided. The ion source may include an ion chamber to generate an ion beam comprising a metal ion species; and a charge source, coupled to deliver a metal vapor to the ion chamber, the charge source including a charge mixture. The charge mixture may include a first portion, comprising an elemental metal; and a second portion, comprising a heterogeneous metal fluoride compound.