The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2024
Filed:
Dec. 29, 2020
University of Maryland, College Park, College Park, MD (US);
Government of the United States of America As Represented BY the Secretary of Commerce, Gaithersburg, MD (US);
Cheng Zhang, Gaithersburg, MD (US);
Shawn Divitt, Gaithersburg, MD (US);
Wenqi Zhu, Vienna, VA (US);
Amit Kumar Agrawal, Rockville, MD (US);
Henri Lezec, Silver Spring, MD (US);
UNIVERSITY OF MARYLAND, COLLEGE PARK, College Park, MD (US);
GOVERNMENT OF THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF COMMERCE, Gaithersburg, MD (US);
Abstract
High-performance optical-metasurface-based components configured to at frequencies of UV light and, in particular, in deep UV range and performing multiple optical-wavefront-shaping functions (among which there are high-numerical-aperture lensing, accelerating beam generation, and hologram projection). As a representative material for such components, hafnium oxide demands creation and establishment of a novel process of manufacture that is nevertheless based on general principles of Damascene lithography, to be compatible with existing technology and yet sufficient for producing high-aspect-ratio features that currently-used materials and processes simply do not deliver. The described invention opens a way towards low-form-factor, multifunctional ultraviolet nanophotonic platforms based on flat optical components and enabling diverse applications including lithography, imaging, spectroscopy, and quantum information processing.