The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2024
Filed:
Apr. 27, 2022
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Takahiro Yatsu, Tokyo, JP;
Toshiyuki Kimura, Tokyo, JP;
SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo, JP;
Abstract
A cryopump includes a cryopanel disposed in a cryopump housing and including a non-combustible adsorbent, a heater heating the non-combustible adsorbent and the cryopanel, a purge valve connecting the cryopump housing to a purge gas source, a rough valve connecting the cryopump housing to a rough pump, a sensor that generates a measurement signal indicating a temperature of the non-combustible adsorbent or an internal pressure of the cryopump housing, and a controller that controls at least one of the heater, the purge valve, and the rough valve based on the measurement signal so as to execute either a sublimation regeneration sequence for sublimating water from the non-combustible adsorbent by exposing the non-combustible adsorbent to a vacuum atmosphere or a dehydration sequence for dehydrating the non-combustible adsorbent by exposing the non-combustible adsorbent to a dry atmosphere at room temperature or a temperature higher than the room temperature.