The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 30, 2024

Filed:

Dec. 08, 2020
Applicant:

United States of America As Represented BY the Administrator of Nasa, Washington, DC (US);

Inventors:

Hyun Jung Kim, Poquoson, VA (US);

Sang Hyouk Choi, Poquoson, VA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C30B 29/52 (2006.01); C30B 23/08 (2006.01); C30B 23/06 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C30B 23/08 (2013.01); C30B 23/066 (2013.01); C30B 29/52 (2013.01); H01L 21/0242 (2013.01); H01L 21/02433 (2013.01); H01L 21/02532 (2013.01); H01L 21/02609 (2013.01); H01L 21/02631 (2013.01); H01L 21/02658 (2013.01);
Abstract

Some aspects relate to methods of forming an epitaxial layer. In some examples, the methods include ejecting atoms from a molten metal sputtering material onto a heated crystalline substrate and growing a single epitaxial layer on the substrate from the ejected atoms, where the atoms are ejected with sufficient energy that the grown epitaxial layer has at least a partial rhombohedral lattice, and wherein the crystalline substrate is heated to a temperature of about 600 degrees Celsius or less, or about 500 degrees or less. Other aspects relate to materials, such as a material including a single epitaxial layer on top of a crystalline substrate, the layer including one or more semiconductor materials and having at least a partial rhombohedral lattice, or a substantially rhombohedral lattice.


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