The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2024
Filed:
May. 11, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Kartik Shah, Saratoga, CA (US);
Vishwas Kumar Pandey, Madhya Pradesh, IN;
Kailash Pradhan, Campbell, CA (US);
Sairaju Tallavarjula, Santa Clara, CA (US);
Rene George, San Carlos, CA (US);
Eric Kihara Shono, San Mateo, CA (US);
Philip A. Bottini, Santa Clara, CA (US);
Roger Curtis, Stockton, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A gas supply member includes a first side opposite a second side and an inner surface defining a first opening extending between the first and second sides. The gas supply member includes a third side orthogonal to the first side, the third side includes a first extension that has a face partially defining the second side, and the first extension includes a first plurality of holes extending through the first extension to the face. The gas supply member includes a fourth side opposite the third side, the fourth side includes a protrusion that has a face partially defining the second side. The gas supply member also includes a baffle disposed adjacent to the inner surface, the baffle includes a first portion extending from the inner surface and a second portion attached to the first portion, and the second portion orthogonal to the first portion and parallel to the third side.