The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2024
Filed:
Dec. 22, 2020
Institute of Semiconductors, Chinese Academy of Sciences, Beijing, CN;
Changsha Aeronautical Vocational and Technical College, Changsha, CN;
Xuechun Lin, Beijing, CN;
Zhiyan Zhang, Beijing, CN;
Haijun Yu, Beijing, CN;
Houwang Zhu, Changsha, CN;
Quansheng Zeng, Changsha, CN;
Zhiyong Dong, Beijing, CN;
Hao Liang, Beijing, CN;
Wenhao Ma, Beijing, CN;
Hongyang Wang, Beijing, CN;
INSTITUTE OF SEMICONDUCTORS, CHINESE ACADEMY OF SCIENCES, Beijing, CN;
Abstract
A laser cleaning method and device for improving uniformity of a laser cleaning surface are provided. The laser cleaning method includes: applying a peaked-top sine wave signal to a motor; controlling a galvanometer to swing in a reciprocated manner by the motor; shaping a laser beam emitted by a laser to a linear beam by the reciprocated swing of the galvanometer; and performing laser cleaning using the shaped linear beam.