The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2024
Filed:
Jan. 29, 2020
Akoustis, Inc., Huntersville, NC (US);
Shawn R. Gibb, Huntersville, NC (US);
Alexander Y. Feldman, Huntersville, NC (US);
Mark D. Boomgarden, Huntersville, NC (US);
Michael P. Lewis, Charlotte, NC (US);
Ramakrishna Vetury, Charlotte, NC (US);
Jeffrey B. Shealy, Cornelius, NC (US);
Akoustis, Inc., Huntersville, NC (US);
Abstract
A method of manufacture for an acoustic resonator device. The method includes forming a nucleation layer characterized by nucleation growth parameters overlying a substrate and forming a strained piezoelectric layer overlying the nucleation layer. The strained piezoelectric layer is characterized by a strain condition and piezoelectric layer parameters. The process of forming the strained piezoelectric layer can include an epitaxial growth process configured by nucleation growth parameters and piezoelectric layer parameters to modulate the strain condition in the strained piezoelectric layer. By modulating the strain condition, the piezoelectric properties of the resulting piezoelectric layer can be adjusted and improved for specific applications.