The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2024
Filed:
Oct. 04, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Harish Penmethsa, Dublin, CA (US);
Suresh Palanisamy, Coimbatore, IN;
Dinesh Rajamanickam, Coimbatore, IN;
Naresh Kumar Asokan, Coimbatore, IN;
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); C23C 14/34 (2006.01); C23C 14/56 (2006.01); B65G 47/248 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68764 (2013.01); B65G 47/248 (2013.01); C23C 14/34 (2013.01); C23C 14/566 (2013.01); H01L 21/68728 (2013.01);
Abstract
A module of a processing system for flipping a substrate in vacuum includes a clamp assembly for securing the substrate, a first motor assembly coupled to the clamp assembly for rotating the clamp assembly, and a second motor assembly coupled to the first motor assembly for raising and lowering the first motor assembly and the clamp assembly.