The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2024
Filed:
Jul. 12, 2022
Canon Kabushiki Kaisha, Tokyo, JP;
Tadao Nakamura, Utsunomiya, JP;
Takamitsu Komaki, Utsunomiya, JP;
Kiyohito Yamamoto, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
An imprint apparatus for performing an imprint process of forming a pattern of an imprint material on a substrate using a mold includes a mold holding unit that holds the mold, a stage that holds the substrate, a measurement unit that measures marks on the mold or the stage, a driving unit that brings the mold and the substrate into contact, a curing unit that cures the imprint material, and a control unit that controls various steps of the imprint process. The control unit obtains information about a difference between first and second position shift amounts obtained by measuring marks on the mold and substrate before and after performing a first imprint process, respectively. The control unit also controls the imprint apparatus to perform a second imprint process, following the first imprint process, based on the obtained information about the difference from performing the first imprint process.