The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 23, 2024

Filed:

May. 14, 2021
Applicant:

Triad National Security, Llc, Los Alamos, NM (US);

Inventors:

Cristian Pantea, Los Alamos, NM (US);

John James Greenhall, Santa Fe, NM (US);

Alan Lyman Graham, Los Alamos, NM (US);

Dipen N. Sinha, Bay Shore, NY (US);

Assignee:

TRIAD NATIONAL SECURITY, LLC, Los Alamos, NM (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 29/12 (2006.01); G01N 29/24 (2006.01); G01N 29/07 (2006.01); G01N 29/22 (2006.01); G01N 29/27 (2006.01); G06N 20/00 (2019.01); G01N 29/46 (2006.01);
U.S. Cl.
CPC ...
G01N 29/12 (2013.01); G01N 29/07 (2013.01); G01N 29/225 (2013.01); G01N 29/2418 (2013.01); G01N 29/2437 (2013.01); G01N 29/27 (2013.01); G01N 29/46 (2013.01); G06N 20/00 (2019.01); G01N 2291/011 (2013.01); G01N 2291/023 (2013.01); G01N 2291/0289 (2013.01); G01N 2291/101 (2013.01);
Abstract

Techniques are provided for detecting wafer defects. Example techniques include exciting a wafer using an acoustic signal to cause the wafer to exhibit vibrations, measuring one or more of linear frequency response metrics or nonlinear frequency responses metrics associated with the vibrations, and identifying any defects in the wafer based at least in part on one or more of the linear frequency response metrics or nonlinear frequency responses metrics. In embodiments, the wafer includes bismuth telluride (BiTe).


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