The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 23, 2024

Filed:

Dec. 07, 2021
Applicant:

Wisconsin Alumni Research Foundation, Madison, WI (US);

Inventors:

Chang-Beom Eom, Madison, WI (US);

Rui Liu, Madison, WI (US);

Paul Gregory Evans, Madison, WI (US);

Donald E. Savage, Madison, WI (US);

Thomas Francis Kuech, Madison, WI (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 29/20 (2006.01); C23C 16/40 (2006.01); C30B 1/02 (2006.01);
U.S. Cl.
CPC ...
C30B 29/20 (2013.01); C23C 16/403 (2013.01); C30B 1/023 (2013.01);
Abstract

Aluminum oxide (AlO) thin films having a high γ-phase purity and low defect density and methods for making the aluminum oxide thin films are provided. Also provided are epitaxial heterostructures that incorporate the aluminum oxide thin films as growth substrates and methods of forming the heterostructures. The AlOfilms are pure, or nearly pure, γ-AlO. As such, the films contain no, or only a very low concentration of, other AlOpolymorph phases. In particular, the AlOfilms contain no, or only a very low concentration of, the θ-AlOpolymorph phase.


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