The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2024
Filed:
Oct. 14, 2021
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Hiroki Kojima, Chiba-ken, JP;
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Abstract
A manufacturing apparatus of porous glass base material includes deposition apparatuses that manufacture a porous glass base material by generating raw material particles from vaporized raw material compounds in an oxyhydrogen flame, and then depositing the generated raw material particles on a rotating starting material. The manufacturing apparatus includes a storage container that stores liquid raw material compounds for each compound, a vapor generation mechanism that vaporizes the raw material compounds, and a gas channel that supplies the vaporized raw material compounds to the deposition apparatuses. The gas channel includes a common gas channel shared to supply vaporized raw material compounds to the plurality of deposition apparatuses, and individual gas channels branched off from the common gas channel to supply vaporized raw material compounds to each of the deposition apparatuses individually. Each of the individual gas channels has a flow controller, a steam valve, and a valve.