The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2024
Filed:
Aug. 05, 2020
Canon Kabushiki Kaisha, Tokyo, JP;
Yukihiro Inoue, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
In an optical device capable of adjusting a focal position of laser light, the accuracy of laser processing is improved. An optical device which processes a subject by irradiating the subject with laser light, includes: a focal position adjustment mechanism configured to adjust a focal position of the laser light; an incident position adjustment mechanism configured to adjust an incident position of the laser light incident on the subject in a direction perpendicular to a focal direction of the laser light; and a control unit configured to control driving of the focal position adjustment mechanism and the incident position adjustment mechanism, wherein the control unit controls the driving of the incident position adjustment mechanism based on an amount of driving of the focal position adjustment mechanism to correct a shift of the incident position due to change of the focal position.