The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2024
Filed:
Oct. 08, 2021
Applicant:
Nanya Technology Corporation, New Taipei, TW;
Inventors:
Yi-Ju Chen, Taipei, TW;
Jui-Hsiu Jao, Taoyuan, TW;
Assignee:
NANYA TECHNOLOGY CORPORATION, New Taipei, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/02 (2006.01); H01L 23/62 (2006.01); H01L 21/66 (2006.01); H01L 23/525 (2006.01);
U.S. Cl.
CPC ...
H01L 22/14 (2013.01); H01L 23/5256 (2013.01); H01L 23/62 (2013.01); H01L 27/0292 (2013.01); H01L 27/0255 (2013.01);
Abstract
The present disclosure provides a method of operating a benchmark device embedded on a semiconductor wafer. The method includes applying a first voltage to a first electrode of the benchmark device, and applying a second voltage to a second electrode of the benchmark device. The method further includes electrically isolating a first component of the benchmark device from a second component of the benchmark device through a disconnecting switch connected between the first component and the second component.