The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 16, 2024

Filed:

Mar. 13, 2020
Applicants:

Kabushiki Kaisha Toshiba, Minato-ku, JP;

Kioxia Corporation, Minato-ku, JP;

Inventors:

Daiki Kiribuchi, Katsushika, JP;

Takeichiro Nishikawa, Yokohama, JP;

Hidetaka Eguchi, Ota, JP;

Assignees:

KABUSHIKI KAISHA TOSHIBA, Minato-ku, JP;

Kioxia Corporation, Minato-ku, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); G05B 19/418 (2006.01);
U.S. Cl.
CPC ...
H01L 22/10 (2013.01); G05B 19/41875 (2013.01); H01L 22/20 (2013.01); H01L 22/30 (2013.01); G05B 2219/45031 (2013.01);
Abstract

A manufacturing control apparatus has an acquiring part that acquires past manufacturing data in which a target value of an output value of the intermediate product, the output value of the intermediate product, and quality of a final product produced from the manufacturing apparatus are associated with one another, an output predicting part that predicts, based on the target value of the intermediate product and the output value of the intermediate product in the past manufacturing data, the output value of the intermediate product for each of possible target values of the intermediate product, and a quality predicting part that predicts, based on the output value of the intermediate product and the quality of the final product in the past manufacturing data, the quality of the final product from a predicted value of the output value of the intermediate product for each of the predicted possible target values.


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