The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 16, 2024

Filed:

Mar. 17, 2020
Applicant:

Kokusai Electric Corporation, Tokyo, JP;

Inventors:

Tadashi Okazaki, Toyama, JP;

Hajime Abiko, Toyama, JP;

Tomoyuki Miyada, Toyama, JP;

Yukinao Kaga, Toyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/67 (2006.01); G05B 19/418 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); G05B 19/418 (2013.01); H01L 21/02005 (2013.01); H01L 21/67276 (2013.01); H01L 21/67754 (2013.01); H01L 21/67757 (2013.01); H01L 21/67781 (2013.01);
Abstract

There is provided a configuration that includes a substrate holder configured to hold substrates; a transfer mechanism configured to transfer the substrates to the substrate holder; and a controller configured to: acquire a number of substrates mountable on the substrate holder and a number of the product substrates to be mounted on the substrate holder; divide the product substrates into product substrate groups; divide the dummy substrates into dummy substrate groups based on the number of the product substrates, the number of the substrates mountable on the substrate holder, and a number of the product substrate groups; combine the product substrate groups and the dummy substrate groups; create substrate arrangement data for distributing and mounting the product substrates on the substrate holder; and cause the transfer mechanism to transfer the substrates according to the substrate arrangement data.


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