The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 16, 2024

Filed:

May. 17, 2018
Applicant:

Soleras Advanced Coatings Bvba, Deinze, BE;

Inventors:

Wilmert De Bosscher, Drongen, BE;

Ivan Van De Putte, Waregem, BE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/35 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3299 (2013.01); C23C 14/35 (2013.01); H01J 37/32972 (2013.01); H01J 37/3405 (2013.01); H01J 37/3476 (2013.01);
Abstract

A feedback system for controlling properties of a single layer or multiple layer stack is applied on a substrate by means of a vacuum coating process controlled by a plurality of process controlling means. The system includes at least one monitoring device for at least implementing at least two distinct measurement techniques for determining measurement signals at each of a plurality of locations spatially distributed over the coated substrate; at least one processing unit adapted for at least receiving the measurement signals; and a controller for at least providing actuation signals for actuating the plurality of process controlling means.


Find Patent Forward Citations

De Bosscher, Wilmert. (2024). Feedback system (U.S. Patent No. 11875979). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11875979

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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