The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 16, 2024

Filed:

Apr. 21, 2020
Applicant:

Prodrive Technologies Innovation Services B.v., Son en Breugel, NL;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03K 5/00 (2006.01); H01J 37/32 (2006.01); H03K 3/02 (2006.01); H03K 5/003 (2006.01); H03K 5/01 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32174 (2013.01); H01J 37/321 (2013.01); H03K 3/02 (2013.01); H01J 2237/327 (2013.01); H03K 5/003 (2013.01); H03K 5/01 (2013.01);
Abstract

Methods and devices for generating a voltage waveform at an output may include providing four DC voltages of different magnitudes. The first (V) magnitude is higher than the third (V) and fourth (V) magnitude. The fourth DC voltage is coupled to the output followed by coupling the first DC voltage to the output, to bring an output voltage (V) at the output to a high level. The first DC voltage is decoupled from the output, followed by coupling the third DC voltage to the output, to obtain a drop of the output voltage (V). A ground potential (V) is coupled to the output following coupling the third DC voltage and the second DC current (I) is coupled to the output following coupling the ground potential, wherein the second DC current ramps down the output voltage (V).


Find Patent Forward Citations

Driessen, Antonius Wilhelmus Hendricus Johannes. (2024). Voltage waveform generator for plasma processing apparatuses (U.S. Patent No. 11875972). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11875972

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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