The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2024
Filed:
Nov. 22, 2021
Adtec Plasma Technology Co., Ltd., Hiroshima, JP;
Toshihiro Takahara, Hiroshima, JP;
Takamichi Kishira, Hiroshima, JP;
Katsunori Tanaka, Hiroshima, JP;
Adtec Plasma Technology Co., Ltd., Hiroshima, JP;
Abstract
Provided is a high frequency power source allowing the user to arbitrarily set a temporal change pattern for the value of high frequency power to be outputted. A high frequency power sourceA according to the present invention includes an output portionconfigured to output high frequency power to a loadvia an impedance matching circuit, a data storage portionA configured to store command data created by a user, and a control portionA configured to control the output portionand the impedance matching circuiton the basis of the command data stored in the data storage portionA. Each of a plurality of records that constitute the command data includes power command data about a value of high frequency power to be outputted and matching operation command data about whether to activate the impedance matching circuit, and the control portion sends a power signal, which is generated on the basis of the power command data, to the output portion and a synchronization signal, which is generated on the basis of the matching operation command data, to the impedance matching circuit.