The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2024
Filed:
Nov. 09, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Chongyang C. Wang, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Methods and systems for cleaning process sequence management are provided. An indication is received from a client device of a sequence of cleaning operations associated with a substrate process at a manufacturing system. An indication of one or more cleaning criteria that trigger initiation of the sequence of cleaning operations during a cleaning process at a process chamber of the manufacturing system is also received. A set of instructions corresponding to the sequence of cleaning operations is generated. In response to a detection that at least one of the one or more cleaning criteria is satisfied, the generated set of instructions are executed to initiate the sequence of cleaning operations at the process chamber.